| Title: | MEMS reliability for critical and space applications : 21-22 September, 1999, Santa Clara, California |
| Authors: | Russel A. Lawton |
| Material Type: | book |
| Publisher: | Bellingham, Wash. : SPIE Press, 1999 |
| Series: | Proceedings of SPIE (the International Society for Optical Engineering) |
| ISBN / ISSN / EAN : | 978-0-8194-3477-7 |
| Format: | vi, 176 p. / ill. / 28 cm |
| Bibliography note: | Includes bibliographical references and index. |
| Languages: | English |
| Subjects: | Microelectromechanical systems--Reliability--Congresses |
| Format : | In print |
| Permalink: | https://isulibrary.isunet.edu/index.php?lvl=notice_display&id=5240 |
Holdings (1)
| Barcode | Call number | Section | Status | Donated by | Digital bookplate |
|---|---|---|---|---|---|
| 008028 | TK7875 .M46 1999 | Closed-stacks | Available |
